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Nano- and microelectromechanical systems:fundamentals of nano- and microengineering
紀錄類型 ： 書目-語言資料,印刷品: 單行本
副題名 ： fundamentals of nano- and microengineering
出版地 ： Boca Raton, FL
出版者 ： CRC Press;
出版年 ： 2000
面頁冊數 ： 338 p.ill. : 24 cm.;
集叢名 ： Nano- and microscience, engineering, technology, and medicine series
標題 ： Microelectromechanical systems -
ISBN ： 0849309166
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Lyshevski,, Sergey Edward
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - Boca Raton, FL : CRC Press, 2000. - 338 p. ; ill. ; 24 cm.. - (Nano- and microscience, engineering, technology, and medicine series).
Includes bibliographical references and index.
ISBN 0849309166
Microelectromechanical systems
Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - Boca Raton, FL : CRC Press, 2000. - 338 p. ; ill. ; 24 cm.. - (Nano- and microscience, engineering, technology, and medicine series).
Includes bibliographical references and index.
ISBN 0849309166
Microelectromechanical systems
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